As the core equipment for converting liquid water into micrometer level water mist, the operation specifications of pure water atomizer directly affect the equipment life, testing accuracy, and environmental safety.
Maintenance system for pure water atomizer: graded management strategy:
1. Daily maintenance requires the implementation of the "five check system": checking the insulation layer of the power line, checking the sealing ring of the smoke pipe, checking the water level sensor, checking the atomizing nozzle, and checking the drainage valve. Deep cleaning is required once a week. After disassembling the atomization chamber, soak it in a 1:3 white vinegar solution for 30 minutes. This method can remove over 98% of scale deposits.
2. Quarterly maintenance should focus on testing the performance of ultrasonic oscillators, using a laser particle size analyzer to test the particle size distribution of atomization. When the D50 value deviates from the set value by ± 15%, the oscillator components need to be replaced. Every 500 hours of operation, the circuit board needs to be treated with dust removal, and a compressed air tank should be used to blow the gaps between the heat dissipation fins at a pressure of 0.2 MPa.
3. Annual maintenance needs to be entrusted to a professional organization, and the testing items include: insulation resistance test (≥ 50M Ω), grounding resistance test (≤ 0.1 Ω), and smoke uniformity test (coefficient of variation CV ≤ 5%).
Safe operation specifications for pure water atomizers: Key points for risk prevention and control:
In terms of electrical safety, the principle of "one machine, one switch" must be strictly followed, and it is prohibited to share sockets with other high-power equipment. The grounding resistance of the equipment casing needs to be regularly tested. When the grounding wire breaks or has poor contact, the static electricity generated during equipment operation may ignite high concentration water mist (although non-toxic, it has high oxygen content).
2. In terms of environmental safety, it is necessary to confirm that water mist particles will not contaminate sensitive materials such as photoresist when used in semiconductor cleanrooms. Prior to testing, a compatibility test must be conducted by spraying water mist onto the surface of the sample for 24 hours and observing under a microscope for any signs of corrosion.
3. In terms of operational safety, it is prohibited to touch the atomizing nozzle during equipment operation, as its surface temperature can reach 60-70 ℃, which may cause low-temperature burns. When moving the device, the water tank needs to be emptied first, as the inertial impact of 4 liters of water may cause the host to fall and be damaged. When the smoke output suddenly decreases, it is necessary to immediately stop the machine for inspection. Forceful operation may cause the ultrasonic oscillator to break, and the splashing ceramic fragments have high-speed penetration.
