MFCGas mass flow controller is a precision instrument that can accurately measure and control gas mass flow. Its core principle is based on thermal conduction or pressure difference measurement technology, and high-precision and fast response flow control is achieved through sensors and control valves. It is widely used in semiconductor manufacturing, chemical industry, pharmaceuticals, environmental monitoring and other fields.

　　MFCApplication areas:

semiconductor manufacturing

Accurately control the gas flow rate in processes such as chemical vapor deposition (CVD), etching, and diffusion to ensure chip quality. For example, controlling the flow rate of reaction gases such as silane to ensure the uniformity of film deposition.

chemical production

Optimize reaction conditions and improve production efficiency. For example, controlling the flow rate of reactants to control the speed and efficiency of chemical reactions.

pharmaceutical industry

Ensure the accuracy and reliability of sterile gas supply. For example, controlling the flow of drugs or gases to ensure the normal operation of medical equipment.

Environmental Monitoring and Governance

Real time monitoring of gas flow in the atmosphere provides data support for air quality assessment, pollution source tracking, and pollution control. In environmental protection equipment such as exhaust gas treatment and air purification, precise control of gas flow during the treatment process ensures optimal treatment results.

other fields

Measurement and control of fuel gas mass flow rate for boilers and cracking furnaces; Measurement of mass flow rate for petrochemical, oil extraction, and flare gas; Measurement and control of air mass flow rate for combustion furnaces; Food processing, chlorine gas control in water plants, etc.