In the grand map of modern industry, instruments and meters are undoubtedly the eyes that illuminate the way forward, and the quality and technological height of fluid measurement and control and its core components are like precision gears, directly determining the operational efficiency and accuracy of advanced manufacturing industries such as semiconductors.

This is our independently developed MFC330 series gas mass flowmeter/controller, which can be used in industries such as semiconductors, photovoltaics, vacuum coating, life sciences, fuel cells, high-precision analytical instruments, petrochemicals, gas production, medical, food, and industrial automation control. ”On November 26th, Yang Zhaobao, the general manager of Suzhou Aituoli Electronic Equipment Co., Ltd. (hereinafter referred to as "Aituoli"), introduced the flowmeter in his hand. On that day, he officially settled in Wujiang Development Zone Semiconductor Intelligent Manufacturing Innovation Port with the project of "Research and Industrialization of Semiconductor Grade Gas Mass Flow Meter".

The first phase of the Aituoli factory, which opened this time, covers an area of 1000 square meters and is equipped with 100000 level and 1000 level clean workshops, a professional R&D team, and a comprehensive service platform. With a beautiful vision and firm belief for the future, we have come to Wujiang Development Zone to start a new business, hoping to inject strong new momentum into the domestic substitution process of semiconductor core components in Wujiang and even the whole country, "said Yang Zhaobao.

In order to break the dependence of domestic gas mass flowmeter core components on foreign imports, Yang Zhaobao has been conducting comprehensive localization research and development of gas mass flowmeter core components (mass flow sensor, micro gas proportional valve) since 2019. As one of the few domestic enterprises capable of independently developing and producing high-precision gas mass flow meters and gas mass flow controllers, its core components of capillary column sensors and high-precision micro gas proportional valves are fully domestically produced, with a self-developed and self-made rate of 100%, and the entire process is independently controllable. Its performance surpasses that of similar imported products.

We have been making breakthroughs in this technology for nearly 5 years, and I think it is something we are particularly proud of. We must innovate and create something unique for our country, "Yang Zhaobao said. The company plans to complete the research and development of high-performance gas mass flow meters equipped with nationally produced laminar differential pressure gas mass flow sensors and piezoelectric all metal sealed proportional valves by March 2025, and begin testing. It is expected to enter small-scale trial production and market promotion in June 2025.

The vision of Aituoli is to become an innovative enterprise with influence in the field of fluid measurement and control. We focus on the development of core components with independent intellectual property rights and comprehensive localization, in order to break the technological monopoly of imported products, get rid of dependence on imported brands, vigorously improve the level of process and scientific research in China's production substitution and application scale, and create reliable fluid measurement and control products with comprehensive localization as soon as possible, solving the 'bottleneck' dilemma faced by China's basic science and process fields, "Yang Zhaobao said frankly.

In recent years, Wujiang Development Zone has aimed to cultivate the semiconductor intelligent equipment industry and create a semiconductor intelligent equipment industry cluster. Since May this year, 12 enterprises have successively entered the semiconductor intelligent manufacturing innovation port. Relying on the "talent+technology+fund" project, Aituoli will take advantage of the rapid development of the semiconductor industry and make great strides in the development zone.

I think the English word 'Family' is the most appropriate to describe the affinity of Wujiang Development Zone. Wujiang Development Zone has provided us with 'suitable soil, nutrients, and sunshine' to help our enterprises grow and thrive. In the future, Aituoli will form a core team with innovative spirit and professional capabilities, including talents in research and development, technology, marketing, operations, and other fields. At the same time, we value the different perspectives and ways of thinking of members from different backgrounds, helping the team to tackle various challenges in product innovation and market development. ”Yang Zhaobao said.

Reprint the official account of Wujiang Development Zone