The 9th International Carbon Materials Conference was crowded with people at the N1 and N2 exhibition halls of the Shanghai New International Expo Center. In the precision manufacturing and new energy materials exhibition area, seemingly inconspicuous gray instruments have attracted the attention of many professional visitors - they are gas mass flow meters.

The precision manufacturing of the carbon material industry chain, from diamond film deposition to silicon carbon anode material preparation, precise gas flow control directly affects the performance and quality of the final product.

The grand opening ceremony

The 9th International Carbon Materials Conference and Industry Exhibition will kick off on December 9, 2025 at the Shanghai New International Expo Center. With the theme of "Materials Innovation Driving Industrial Transformation", the conference is expected to attract over 50000 professional visitors.

Co hosted by DT New Materials and China Superhard Materials Network.

The exhibition hall is divided into N1 Semiconductor Carbon Materials Hall and N2 Energy and Equipment Carbon Materials Hall, focusing on the full chain display of carbon materials from basic research to industrial application.

Among the nearly 400 exhibitors on site, there are many companies like Etuoli Electronics that focus on providing key measurement and control technologies for precision manufacturing.

The 'gas pulse' of carbon dioxide material manufacturing

In the carbon material industry chain, whether it is CVD diamond growth or the preparation of silicon carbon negative electrode materials, gas flow control is the core process link.

Chemical vapor deposition (CVD) is a key technology for manufacturing high-quality diamond films, and the precise control of the flow rate of methane and other gas sources directly affects the crystallization quality and purity of diamond films.

In the field of new energy, the precise ratio and dynamic control of process gases such as silane and acetylene are also crucial in the preparation process of silicon carbon negative electrode materials.

At this exhibition, gas flow intelligent control system became one of the key technological directions showcased by multiple exhibitors. This type of system ensures the consistency and stability of the carbon product process by precisely controlling the gas flow rate.

The technical strength of San Ai Tuoli

In the field of gas flow control, Etuoli showcased its multiple series of gas mass flow meters, including MFC300, MFC330, MFC350, and MFC600.

Taking the MFC300 series designed specifically for small flow scenarios as an example, it uses MEMS flow sensors and comes with temperature and pressure compensation functions. Its measurement accuracy can reach ± 0.5% F.S., while the sensor response time is only 5 milliseconds.

The core advantage of the Aituoli flowmeter lies in its high precision and high stability. Taking the MFC600 series as an example, the accuracy can reach ± 0.2% F.S., the linearity is ± 0.1% F.S., and the repeatability accuracy reaches ± 0.05% F.S.

This high-precision characteristic is crucial in the dynamic gas distribution process, ensuring precise control of the flow rates of each component and thus ensuring the accuracy of the final mixed gas concentration.

Four on-site focus applications

At the semiconductor materials exhibition area, Etuoli showcased its application cases of gas flow meters in diffusion processes. In the semiconductor and photovoltaic manufacturing industries, diffusion furnaces are one of the core equipment used to achieve precise doping and thin film growth.

The success or failure of the diffusion process and the final performance of the product are directly determined by the precise measurement and control of the process gas by the Aituoli gas mass flowmeter and controller.

For example, the MFC330 series can provide small flow specifications as low as 0-5 SCCM, ensuring that dopant concentration and distribution meet stringent process requirements.

In the area of new energy material preparation, Aituoli showcased a solution for the preparation of silicon carbon negative electrode materials. High risk process gases such as silane (SiH ₄) and acetylene (C ₂ H ₂) need to be processed in the preparation of silicon carbon negative electrodes, which puts special requirements on gas flow meters.

Five industry trends and future prospects

The importance of gas flow control in the carbon materials industry chain is increasingly prominent. With the continuous improvement of precision requirements for gas mixtures in industrial processes, gas flowmeter technology is also constantly advancing.

The future trend shows that intelligent flow meters will be able to achieve remote monitoring, predictive maintenance, and adaptive control, further enhancing the intelligence level of dynamic gas distribution instruments.

The Aituoli flowmeter series products provide multiple communication interfaces, including analog signals, RS232, RS485, RS422, and CAN bus, which facilitate integration with the main control system, achieve remote monitoring and automation control, and these functions are in line with the future trend of intelligent development.

At the same time as the Carbon Materials Conference, there will also be application side conferences such as the 2025 Diamond Annual Conference, Carbon Fiber Equipment Manufacturing Conference, and New Energy Carbon Materials and Batteries Conference, which will deeply explore the innovative development of carbon materials in the fields of semiconductors, new energy, and equipment.