Samples were prepared by melting lithium tetraborate and lithium nitrate as fluxes, and Nb and Ta elements were added as internal standards for Zr and Hf, respectively. The correction effects of various spectral line overlap interference were discussed, and various internal standard correction methods were analyzed and compared. The quadratic interference curve method was selected and corrected for spectral line overlap interference and matrix effect by adding internal standard elements in a certain order. An X-ray fluorescence spectroscopy analysis method was established for the determination of zirconia and hafnium oxide with a wide range of content in zirconia reagents and minerals