The high vacuum magnetron sputtering evaporation coating instrument is a device used to prepare thin films in a vacuum environment by combining magnetron sputtering technology and evaporation method. It is mainly used for thin film preparation in fields such as semiconductor materials and optical components.
Performance Characteristics
High film quality: The thin film deposited by magnetron sputtering is dense and has strong adhesion, which can accurately control the film thickness and composition; Vacuum evaporation can achieve the deposition of high-purity thin films, and the combination of the two can prepare high-performance thin films, which have good application effects in optical thin films, electronic device thin films, and other fields.
Widely used coating materials: capable of processing various materials such as metals, alloys, compounds, semiconductors, etc. It can deposit high melting point metal, alloy, and compound thin films through magnetron sputtering, as well as pure metal, organic matter, and other thin films through vacuum evaporation.
Strong process flexibility: Multiple coating processes can be achieved by adjusting the power, gas pressure, target substrate distance of magnetron sputtering, as well as the heating temperature and evaporation rate of vacuum evaporation, such as single target sputtering, multi target co sputtering, reactive sputtering, evaporation coating, and their combination processes.
Application field
In the field of electronics, it is used to prepare electrodes, interconnect layers, barrier layers for semiconductor chips, as well as transparent conductive films and optical dielectric films for flat panel displays, such as indium tin oxide transparent electrodes and copper interconnect layers.
In the field of optics, optical thin films such as anti reflective films, filter films, and reflective films can be prepared to improve the optical performance of optical components, such as applications in laser devices, solar cells, optical lenses, etc.
In the field of machinery, hard wear-resistant coatings, self-lubricating coatings, etc. are deposited on the surfaces of molds, bearings, etc. to improve their hardness, wear resistance, and service life.
Decoration field: Used for coating metal films, alloy films, colored films, etc. on the surfaces of automotive interior and exterior parts, electronic product casings, jewelry, etc., to enhance the beauty and decoration of products.