Spin coating machine "is a coating device that utilizes rotational centrifugal force, also known as a" spin coating machine ". For smooth coated objects (workpieces), a thin and uniform coating can be formed. The use of spin coating machines is very extensive, with representative applications including surface treatment of semiconductor wafers, photoresist coating and other process procedures, as well as the coating of optical media coatings, lens substrates and dimming liquids.

• Spin coating machine coating

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1. A. Rotating body

3. B. Surface of the coated object

5. C. Coating solution

Drop the coating liquid onto the center of the object (workpiece) to be coated and perform high-speed rotation. Accelerating the rotation will apply centrifugal force to the coating liquid, causing it to spread over the entire surface and form a film. The thickness of the coating film depends on the viscosity of the coating liquid, the rotational speed of the coated material, the acceleration of rotation, and the exhaust related to the drying speed.
The principle of spin coating relies on the centrifugal force of rotation to shake off excess coating liquid from the object being coated. Therefore, the actual amount of film formed is less than the amount of liquid dropped, which has the disadvantage of causing material loss.

In order to control the drying speed through exhaust, prevent the coating liquid from splashing outside the equipment, and avoid foreign objects from entering, the rotating body and dripping mechanism are usually stored in the box or designed with the cover closed during coating.
The basic principles of the equipment have not changed in recent decades, but devices suitable for different sizes, weights, and materials of the coated material, as well as specifications and functions such as speed control and automatic dripping, have achieved more diversified development.