The de coating process is an important step in the micro fabrication process. After micro nano fabrication processes such as electron beam exposure and ultraviolet exposure, the photoresist needs to be removed or treated as a base film. Whether the photoresist is completely removed and whether there is damage to the sample will directly affect the smooth completion of subsequent processes. The PLUTO-MD mini glue remover uses high-performance components and software to precisely control process parameters. Its process monitoring and data acquisition software can achieve strict quality control. This technology has been successfully applied to power transistors, analog devices, sensors, optical devices, optoelectronics EMS/MOEMS、 Biological devices, LED and other fields.