PLUTO-30 (30L) Multi functional Plasma Cleaning Machine - Watch Video Online

PLUTO-30 is a fully functional plasma system designed specifically for research and development. The 13.56MHz RF generator and automatic matching network power supply generate uniform plasma throughout the entire process area. The vacuum chamber of Pluto 30 can support up to 7 adjustable sample racks to accommodate samples of various shapes and sizes. Pluto 30 has multiple electrode settings that can be configured for RIE and PECVD modes, expanding the application range of the system and providing users with good flexibility.