1、 Preparation before operation (5 minutes to complete, safety first)

security check:

Confirm that the instrument is well grounded (to avoid leakage) and the power supply voltage meets the rated requirements (such as AC220V ± 10%);

Check whether the gas pipelines (such as argon, oxygen, nitrogen) are tightly connected and leak free (can be detected by applying soapy water to the joints, if there are no bubbles, it is normal);

Open the fume hood (if dealing with volatile samples) or exhaust device to avoid environmental pollution caused by the small amount of gas generated by plasma reactions.

Sample preparation:

Clean the large impurities (such as dust and oil stains) on the surface of the samples to be cleaned (such as chips, glass, plastic parts, and metal parts) in advance (wipe with anhydrous ethanol and air dry) to avoid impurities affecting the cleaning effect;

Fix the sample on the sample holder, ensuring that the surface of the sample is unobstructed (the plasma needs to be evenly covered), and place the sample holder in the center of the reaction chamber (avoiding proximity to the electrode).

Consumables and Environmental Confirmation:

Check the pressure of the gas cylinder (usually maintained at 0.2-0.5MPa) to ensure sufficient gas supply;

Confirm that the sealing gasket of the reaction chamber door is clean and undamaged (to ensure the vacuum sealing effect), and that there is no strong vibration or dust in the experimental environment (to avoid affecting the operation of the instrument).

2、 Core operating steps (intelligent settings, no manual intervention required)

Start the instrument and vacuum extraction:

Turn on the main power of the instrument, start the control system (some models use touch screen operation), select "manual mode" or "automatic mode" (recommended for beginners, automatic mode with built-in common cleaning parameters);

Close the reaction chamber door, press the "vacuum" button, and the instrument will automatically start the vacuum pump to pump the pressure inside the reaction chamber to the set vacuum degree (usually 10-100Pa, adjusted according to the sample type). After the vacuum is completed, the instrument will automatically prompt (indicator light on or beep).

Gas inlet and parameter setting:

Select the type of cleaning gas (such as oxygen for cleaning oil stains, argon for surface activation, argon+oxygen for composite cleaning), and set the gas flow rate (usually 10-50 sccm, excessive flow rate can easily damage the vacuum, and insufficient plasma concentration);

Set cleaning parameters:

Power (50-300W, choose high power for hard samples, low power for soft/thermal sensitive samples);

Cleaning time (30-10 minutes, short time for mild pollution, long time for deep cleaning);

Some models support "segmented parameters" (such as low-power preprocessing before high-power cleaning), which can be set as needed.

Start plasma cleaning:

After confirming the parameters are correct, press the "Start Cleaning" button, and the instrument will automatically execute the process: first maintain stable gas flow and vacuum degree, and then start the RF power supply to generate plasma (weak glow will appear in the reaction chamber, which is a normal phenomenon);

During the cleaning process, the screen displays real-time parameters such as vacuum degree, gas flow rate, power, and remaining time, without the need for manual adjustment. If any abnormalities occur (such as inadequate vacuum degree or gas leakage), the instrument will automatically sound an alarm and shut down.

3、 Closing after operation (completed in 3 minutes, protecting the instrument and sample)

Stop cleaning and pressure relief:

After the cleaning time is over, the instrument automatically shuts off the RF power and gas valve, and enters the "pressure relief" process (introducing a small amount of inert gas, such as nitrogen, into the reaction chamber to balance the internal and external pressures);

After the pressure relief is completed (the pressure inside the reaction chamber returns to atmospheric pressure), the instrument prompts "operation completed", and the reaction chamber door can only be opened at this time.

Take out samples and inspect:

Wear gloves to take out the sample and observe the surface condition of the sample (such as whether it is dry, free of residue, and whether the surface tension has increased. The cleaning effect can be verified by water droplet contact angle test);

If multiple samples need to be processed continuously, the steps of "sample preparation → vacuuming → cleaning" can be repeated without turning off the main power of the instrument.

Instrument shutdown and maintenance:

After all sample processing is completed, close the gas cylinder valve, press the "vacuum pump stop" button, wait for the vacuum pump to completely stop (to avoid oil return from the vacuum pump), and turn off the instrument's main power supply;

Wipe the sealing gasket and sample holder of the reaction chamber door with a clean cloth, remove a small amount of dust (if any) from the reaction chamber, keep the instrument clean, and extend its service life.

The operation process of plasma cleaning machine is standardized and intelligent, with a focus on "button operation+parameter setting" throughout the process, without the need for complex mechanical adjustment or chemical knowledge. Novices can master basic operations in 10 minutes. Its "complexity" is mainly reflected in "parameter selection" (such as different samples corresponding to different gases, powers, and times), rather than the operation steps themselves - as long as appropriate parameters are selected according to the sample material (hard/soft, temperature resistance) and cleaning purpose (oil removal, activation, etching), efficient cleaning can be achieved.