Probe micro cold and hot stage is a scientific instrument that combines probe testing and temperature control, mainly used for electrical performance testing of semiconductor devices in high/low temperature environments. It can achieve accurate temperature control from -190 ℃ to+600 ℃, support rapid heating/cooling (1-200 ℃/min), and is suitable for experiments such as material sintering and melting point analysis. Equipped with a precision probe system, supporting DC/RF testing, capable of measuring chip resistance, reliability testing, and temperature characteristic testing in high/low temperature environments. Compatible with optical microscopes, it can observe microstructural changes such as fluid inclusions and molten inclusions, and is suitable for fields such as mineralogy and materials science.
Its core function is to:
Wide temperature range control: By using liquid nitrogen refrigeration, resistance heating, or semiconductor refrigeration (Peltier effect) technology, a wide temperature range of -190 ℃ to 1000 ℃ can be controlled.
Probe electrical testing: equipped with X/Y/Z three-axis precision displacement platform (such as displacement accuracy ≤ 1 μ m), supporting micrometer level alignment between the probe and the sample surface, to achieve electrical performance testing such as conductivity and IV curve. For example, in semiconductor device research, the electrical characteristics of wafer level samples can be accurately measured at different temperatures.
Microscopic imaging collaboration: integrating optical transparent windows (such as sapphire glass) or transparent hole designs, compatible with optical microscopes, fluorescence microscopes, Raman spectrometers and other equipment, to achieve real-time observation of the microstructure of samples during temperature changes. For example, in materials science, the lattice structure changes of polymer materials during phase transition can be observed.
Application scenarios
Semiconductor testing: Evaluate the electrical performance stability of chips at * * temperature.
Materials research: Study thermal physical properties such as thermal expansion coefficient and phase transition temperature.
Industrial testing: Temperature resistance and reliability testing of automotive parts and electronic components.