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Shanghai Boming Scientific Instrument Co., Ltd
Microscopic spectrophotometer is a high-precision thin film thickness measurement instrument that combines microscopy and spectrophotometry technology
Date: 2025-09-03Read: 0
Microscopic spectrophotometer is a high-precision measuring instrument based on the principles of light interference and spectroscopy, mainly used for non-destructive and non-contact measurement of the thickness of thin films, chips, optical materials, and multilayer films, and analysis of their optical constants (such as refractive index and extinction coefficient).
By using microscopic spectroscopy to measure the spectral reflectance of small areas, when light is reflected multiple times on the front and back surfaces of the film to form interference fringes, spectroscopic technology decomposes the interference fringes into spectra of different wavelengths and measures their intensity distribution. The film thickness and optical parameters are calculated through algorithms.
The micro spectrometer film thickness gauge achieves non-destructive and non-contact measurement through the principles of light interference and spectroscopy. When light is irradiated onto the surface of the film, interference fringes are formed by multiple reflections on the front and back surfaces of the film. Spectral analysis technology decomposes these fringes into spectra of different wavelengths. By measuring the spectral intensity distribution and combining it with algorithm calculations, parameters such as film thickness (1nm-35 μ m), refractive index (n), extinction coefficient (k), etc. can be accurately obtained.
It usually consists of optical system, detection system, control system, and sample stage. The optical system includes a light source, a beam splitter, a reflective objective lens, etc., used to generate and transmit light, and focus the light onto the surface of the sample; The detection system generally consists of detectors, etc., used to detect the intensity of reflected or transmitted light; The control system is responsible for the operation of instruments and data processing; The sample stage is used to place samples and can realize the movement and positioning of samples.
Precautions for use
Environmental control: Avoid direct sunlight, high temperature, and humid environments to prevent the optical system from getting damp or contaminated.
Calibration and maintenance: Regularly use standard samples for calibration, clean optical components to extend their lifespan.
Sample processing: Ensure that the surface of the sample is flat before measurement to avoid roughness affecting the reflectivity data.
Data Security: Choose a model that supports data storage and transmission (such as USB, Bluetooth) for easy analysis in the future.