In precision fields such as semiconductor manufacturing, the IGS gas path system, as the core hub of gas transportation, has strict requirements for mass flow controllers. The characteristics of high sealing, high precision, and high integration require flow control equipment to be matched in terms of stability, adaptability, and control accuracy. The Yidu laminar pressure differential mass flow controller, with its unique technological advantages, has become an ideal choice to meet these requirements.

The precision process characteristics of the IGS gas path system first require the flow controller to have high measurement accuracy and long-term stability. The Yidu laminar flow differential pressure product is based on viscous fluid mechanics, and uses internal precision laminar flow components to forcibly convert gas into a stable laminar flow state, capturing flow rate changes using high-precision differential pressure sensors. This measurement method eliminates the dependence on gas thermophysical properties, is minimally affected by environmental temperature and pressure fluctuations, and can maintain stable control accuracy under complex operating conditions. Compared to traditional thermal products, its core components have stronger physical stability and are less prone to performance degradation due to aging or slight pollution. They do not require frequent calibration during long-term use.

Compact space is a prominent feature of IGS pneumatic systems, which places high demands on the installation flexibility of flow controllers. The Yidu laminar pressure differential mass flow controller breaks through the limitations of installation direction, and its measurement principle relies on pressure differential and viscous force that are not affected by gravity. It can maintain stable performance regardless of vertical, horizontal, or inclined installation. At the same time, laminar flow components themselves have a powerful flow field rectification effect, which can effectively disperse upstream eddies without the need for additional reserved straight pipe sections. Even if installed directly behind elbows or valves, it does not affect accuracy, greatly simplifying system integration design and adapting to the miniaturization requirements of IGS gas circuits.

The IGS gas path system often needs to transport multiple gases or even mixed gases, and the gas adaptability of the flow controller is crucial. This product from Yidu has a built-in rich gas database, and precise control can be achieved by simply inputting the corresponding gas viscosity parameters. Its adaptability to non-standard mixed gases is particularly outstanding. The flow channel is made of corrosion-resistant materials, with smooth inner walls and a large diameter. It can withstand corrosive gases and is not easily blocked. Even if a small amount of liquid infiltrates, it can be restored to use after simple flushing, greatly reducing maintenance costs. This anti pollution capability precisely meets the safety requirements of the IGS gas path system for special gas control.

In the complex electromagnetic environment of industrial sites, the requirements for equipment stability in IGS gas path systems are further enhanced. Yidu laminar pressure differential products have passed rigorous electromagnetic compatibility testing and can maintain stable performance even under harsh conditions. Its fast response speed and multi-mode control function can flexibly switch control modes such as mass flow and volume flow according to the real-time requirements of the IGS gas path. It also supports multiple communication protocols to achieve seamless integration with the system.