Shaanxi Yidu Intelligent Technology Co., Ltd. was established in 2015 and is headquartered in Xi'an Economic and Technological Development Zone. The company focuses on the research and manufacturing of gas mass flow meters and mass flow controllers, and is one of the few enterprises in China that has mastered the core technology of laminar pressure difference.

The core R&D team of the company is composed of postdoctoral and doctoral fellows from Northwestern Polytechnical University. With profound accumulation in the field of microfluidics measurement and control, they are committed to solving the "bottleneck" technical problems in precision manufacturing.

Technical roadmap and product advantages

Yidu Intelligent adheres to the differentiated technology route of laminar pressure differential, and its products have significant advantages compared to traditional thermal principle products, achieving a leap from "technically usable" to "technically user-friendly".

High precision and high stability: Based on the principle of laminar flow physics, the product has excellent measurement repeatability and long-term stability. The measurement error of some high-precision models can be controlled within ± 0.5% of the reading.

Ready to use upon startup, fast response: no need for prolonged preheating like a thermal instrument, allowing for "test upon startup". At the same time, the response speed is extremely fast, reaching milliseconds, which can meet the demand for fast switching in semiconductor processes.

Strong medium compatibility: The product channel can be made of corrosion-resistant materials and has a built-in database of over 70 gases, which can be compatible with a wide range of media from ordinary inert gases to special corrosive gases.

Intelligence and Convenience: Some series of products are equipped with touch screens, allowing users to directly set parameters, switch gases, and view various real-time data on the device, greatly simplifying operations.

Main application areas

With the above technological advantages, Yidu Intelligent's products play a key role in multiple fields that require strict gas control:

Semiconductor manufacturing: This is its core application battlefield. The product is used for key processes such as photolithography, etching, and thin film deposition, accurately controlling the flow rate of special process gases, which directly affects the yield of chips. The company has established a Class 100 clean production line for this purpose.

New materials and new energy: Ensure precise gas ratios in coating processes such as chemical vapor deposition and atomic layer deposition. In addition, it is widely used in the research and testing field of fuel cells.

Research and Instruments: In university laboratories and research institutes, its high precision and ease of use are highly favored, used in various experimental devices that require precise gas path control.

Environmental monitoring and industrial safety: Portable handheld mass flow meters can be used for on-site calibration of atmospheric samplers; Fixed products can also be used for flow monitoring of gas analyzers, alarm devices, and other equipment.

Localization Value and Industry Contribution

The growth of Yidu Intelligence is a microcosm of China's localization and substitution in this field. Its products have been mass-produced in the machines of several leading semiconductor equipment manufacturers in China, helping domestic core equipment overcome bottlenecks.

The company also actively participates in the construction of industry standards, participates in the formulation of the national "Laminar Flow Meter Calibration Regulations", and promotes the standardized development of the industry.

Shaanxi Yidu Intelligent Technology Co., Ltd. is a high-tech manufacturing enterprise driven by underlying technological innovation. It has successfully broken the foreign monopoly by deeply cultivating laminar pressure differential technology, providing high-precision and high reliability gas flow measurement and control solutions for key fields such as semiconductors, new energy, and scientific research, and becoming an important link in China's precision manufacturing industry chain.