From July 25th to 27th, 2025, the Western China Semiconductor and Integrated Circuit Industry Expo will be held at the Xi'an International Convention and Exhibition Center. As an advanced local manufacturer of gas mass flow meters and gas mass flow controllers, Shaanxi Yidu Intelligent Technology Co., Ltd. will showcase its independently developed laminar pressure differential mass flow meters and controller series products - these key components that break through the "bottleneck" technology are reshaping the "breathing system" of China's semiconductor equipment.

Localization breakthrough: from technological dependence to independent innovation

Shaanxi Yidu Intelligent Technology Co., Ltdis aFocusing on the research and development of microfluidic control core devices for manufacturing industrytechnologyWith more than ten years of independent research and development technology accumulation, the enterprise has become one of the few domestic enterprises that has mastered the core technology of laminar pressure difference.

The company's R&D team is centered around several postdoctoral fellows and PhDs from Northwestern Polytechnical University, relying on their background in aviation and aerospace, and has a deep technical accumulation in the field of microfluidics measurement and control. Currently obtainedMore than 20 innovative technologies and dozens of domestic and foreign certifications, and participated in the formulation of national standards such as the "Laminar Flow Meter Calibration Regulations".

We insist on developing high-performance products from a formula. The technological development concept of Yidu Intelligence reflects respect for basic science.From demonstration to research and development to mass production, the high performance and stability of the product have enabled Yidu Intelligent Gas Mass Flow Meter and Controller to gain recognition in the semiconductor industrySeveral leading domestic semiconductor equipment manufacturersThe favor.

Precision Control: Semiconductor ManufacturingGas pulse

In the semiconductor chip manufacturing process, the accuracy of special gas control directly determines the chip yield rate. Yidu Intelligent has established a Class 100 cleanroom production line specifically to meet the high standard requirements of semiconductor special gas control, ensuring that products meet the harsh environment of wafer manufacturing.

Yi DuThe product is based on the principle of laminar pressure difference and achieves dynamic compensation through built-in pressure and temperature sensors, solving the three major technical pain points of mixed gas control, fast response, and high-precision requirements in semiconductor manufacturing. It can achieve the characteristic of switching any proportion of mixed gases without the need for conversion coefficients, significantly simplifying the operation process of gas switching in semiconductor processes.

Domestic substitution: fromThe leap from 'usable' to 'useful'

For a long time, the market for quality flow controllers used in semiconductor manufacturing has been monopolized by international brands. Yidu Intelligent has achieved domestic production by leveraging the differentiated advantages of laminar pressure difference technology routeThe key leap of MFC from "technically available" to "technically useful".

Under the trend of domestic substitution, our performance in areas such as semiconductor manufacturing and fuel cell testing is particularly outstanding, "said the head of Yidu Intelligent Technology. The company's products have been widely applied in the machines of several leading domestic semiconductor equipment manufacturers, helping to localize the flow control components of core equipment such as domestic lithography machines and etching machines.

With the acceleration of localization process, domestic productionMFC in the semiconductor marketAlternative demandContinuously improving. Industry data shows that it is expected toBy 2030, the localization rate will exceed 40%, which is the industry's expectation for the penetration rate of domestic quality flow controllers in the semiconductor field. And Yidu Intelligence is at the forefront of this wave of substitution. Outside the spotlight of the Western Semiconductor Exhibition, engineers from Yidu Intelligent are still debugging the next generation of products in the Class 100 cleanroom.

Their goal is clear: to improve product stability and make every semiconductor equipment in China more reliableThe breathing is precise and accurate.

The competition in the field of precision gas flow control has never stopped, but this time,Shaanxi Yidu Intelligent Technology Co., LtdChinese innovators have entered the first tier.