The ion slicer (Focused Ion Beam System, FIB) is a core equipment for characterizing and processing nanoscale materials. It achieves precise cutting and three-dimensional reconstruction of materials through high-energy ion beams, playing a key role in the fields of materials science, electronic devices, and nanotechnology.
Working principle: The core of an ion slicer is to use an ion gun to emit high-energy ion beams (such as gallium ions), which are then focused by a lens and scanned by an electrode to form an extremely fine beam (with a diameter of up to nanometers). Through physical impact and chemical reactions, the surface atoms of the material are stripped layer by layer, forming ultra-thin slices with a thickness of only a few nanometers to tens of nanometers. The precise control of its energy density and scanning speed ensures a balance between cutting efficiency and accuracy. For example, at an energy of 8keV, the thinning rate of silicon materials can reach 40 micrometers per hour, while low-temperature freezing technology can cool the sample to -120 ℃, suppress thermal damage, and ensure the structural integrity of biological tissues or heat sensitive materials.
Core technology: One is the integration of dual beam system, which combines ion beam and electron beam to achieve cutting and real-time observation synchronization; The second is intelligent operation, equipped with CCD camera and LCD control panel, supporting dynamic parameter adjustment and process monitoring; The third is the design of the sample stage, such as the dual mounting foot structure to adapt to 5-30mm samples, and the groove vibration absorption design to improve processing accuracy. In addition, gas assisted sedimentation (GIS) technology can deposit protective layers in cutting areas, reducing edge damage.
Application areas: In semiconductor manufacturing, FIB is used for reverse dissection and failure analysis of chips, revealing nanoscale defects and interlayer structures; In the field of materials science, it can analyze metal grain boundaries, nanoparticle distribution, and stress states; In biological research, prepare ultra-thin cell sections and observe subcellular structures using TEM; Archaeology involves cutting ancient ceramics to analyze their production techniques and historical evolution. Its high precision and flexibility make it a universal platform for interdisciplinary research.