1、 Technical core: closed-loop control from perception to execution
The core competitiveness of Qingdao Xinsheng MFC lies in the deep integration of three major technological modules:
High precision sensorMEMS chips using the principle of thermal diffusion directly calculate mass flow rate by sensing the heat carried away by gas molecules, eliminating interference from environmental parameters such as temperature and pressure, and ensuring the reliability of measurement results.
Intelligent control algorithmBuilt in adaptive PID algorithm, can dynamically adjust control parameters according to process requirements, achieve millisecond level tracking of flow step response, and can quickly restore stability even in the face of complex working conditions.
High response execution agencyThe proportional control valve adopts special alloy materials and precision machining technology, supports wide range ratio adjustment, and ensures the linearity and repeatability of flow control.
This closed-loop system of "perception operation execution" enables Xinsheng MFC to accurately match the strict requirements of gas flow rate in semiconductor etching, fuel cell testing and other scenarios.
2、 Industry application: Empowering core industrial scenarios
1. Semiconductor manufacturing: the "traffic manager" of chip technology
In processes such as CVD (chemical vapor deposition) and PVD (physical vapor deposition), small fluctuations in the flow rate of reaction gases can directly affect the uniformity of film thickness. Xinsheng MFC ensures stable transportation of precursor gas, cleaning gas, and blowing gas through high-precision control, helping to improve chip yield. Its anti-corrosion design is compatible with special gases such as Cl ₂ and WF ₆, meeting the requirements of equipment reliability in the process.
2. Photovoltaic new energy: the "traffic cornerstone" of green energy
In the process of silicon material production and thin film battery coating, the control accuracy of PECVD/PVD equipment on process gas flow directly affects the battery conversion efficiency. The Xinsheng MFC is designed with a wide range ratio, allowing a single device to cover flow ranges from a few milliliters to tens of liters, simplifying system integration while reducing customer costs. Its high-purity flow channel design can better meet the purity requirements of semiconductor grade gases, ensuring the long-term stability of photovoltaic products.
3. Biopharmaceuticals: The 'Flow Guardian' of Life Sciences
The fluctuation of gas flow rate in fermentation process control and chromatography system carrier gas supply directly affects the separation efficiency of active ingredients in drugs. Xinsheng MFC ensures long-term stable transportation of protective gases such as O ₂ and CO ₂ through drift free design. Its anti pollution flow channel and easy to clean structure can meet GMP certification requirements, providing full process support for biopharmaceuticals from laboratory to mass production.
4. Hydrogen energy and fuel cells: the "flow engine" of clean energy
Accurate control of hydrogen flow rate is crucial for safety and efficiency in hydrogen production equipment, refueling stations, and fuel cell testing benches. The Xinsheng MFC, with its explosion-proof design and special alloy sealing, can safely transport flammable and explosive gases such as H ₂ and CH ₄. Its fast response characteristics better match the dynamic working conditions of fuel cells, providing core control components for the hydrogen energy industry chain.
3、 Service commitment: Full cycle support from hardware to solutions
Qingdao Xinsheng not only provides standardized MFC products, but also is committed to developing customized gas flow control solutions for customers:
Adaptation to special working conditionsProvide special material flow channels and sealing designs for corrosive gases, high-pressure applications, and range requirements;
System Integration ServicesSupport networking control of multiple devices, achieve remote monitoring and data acquisition through industrial buses such as RS485 and EtherCAT;
Full lifecycle maintenanceProvide full process services from installation and debugging to regular calibration to ensure long-term stability of equipment operation.
4、 Conclusion: Driving the Future of Industry with Chinese "Chips"
Driven by the dual goals of Industry 4.0 and "dual carbon", the accuracy and intelligence level of gas flow control have become the core indicators for measuring the competitiveness of the manufacturing industry. Qingdao Xinsheng, with its independently controllable MEMS chip technology and profound insight into industrial demand, is using innovative products and professional services to help industries such as semiconductors, photovoltaics, and biomedicine break through technological bottlenecks and provide customers with more accurate and reliable gas flow control experiences.
Choose Qingdao Xinsheng, choose the future of industrial precision control.
Contact our professional team immediately for product selection guidance and customized solutions, and together we will embark on a new chapter in intelligent manufacturing.