1. Gas supply system: The external compressed air source is connected to the gas path system of the probe station through a pipeline. To ensure gas quality, it may first pass through a filtering device to remove impurities, moisture, and oil stains, preventing these pollutants from entering the probe station and affecting the cooling effect or damaging the equipment. At the same time, a pressure regulating device will be equipped to adjust the pressure of the compressed air to a suitable range to meet the working requirements of the probe station.

2. Cooling components such as air-cooled disks: air-cooled disks are installed at key heating areas of the probe station, such as below the sample station or chuck. The interior of the air-cooled plate is usually designed with complex airway structures. After compressed air enters the air cooling plate, it will be evenly distributed along these air ducts, and then blown out at a certain flow rate and angle through the air outlet slots or small holes on the air cooling plate, forming a uniform cold air flow that directly acts on the parts that need to be cooled, such as samples or probes, taking away heat.

3. Temperature control system: In order to accurately control the degree and stability of cooling, the high and low temperature probe stations are equipped with temperature sensors to monitor the temperature of the sample station or key parts in real time. The temperature sensor feeds back the temperature signal to the controller, which automatically adjusts the flow rate or pressure of the compressed air based on the difference between the preset temperature value and the actual measured value. For example, when the temperature is higher than the set value, increase the compressed air flow rate to enhance the cooling effect; On the contrary, reduce the flow rate to keep the temperature within the set range.

4. Circulation and recovery system: Some advanced high and low temperature probe stations are also designed with gas circulation and recovery systems. After completing the cooling task, the blown air is collected through specific channels, processed (such as filtering, dehumidification, etc.), and then sent back to the air cooling system for recycling. This can improve energy efficiency, reduce the consumption of compressed air, and also help maintain the stability of the working environment.

5. Chamber sealing and protection: In order to prevent external hot air from entering and internal cold air from leaking, the working chamber of the probe station usually has good sealing performance. At the same time, insulation materials may be used to wrap the chamber, reducing heat transfer and further improving the cooling effect and temperature control accuracy. It can also effectively isolate external air, prevent a large amount of water vapor from liquefying and forming droplets, and create a dry working environment.