Semiconductor AMC analyzerThe technical features are as follows:
High sensitivity detection technology
Enhanced Absorption Spectroscopy (CEAS) technology: By using self-developed long path gas absorption cells and ultra-low noise laser drivers, sensitivity at the ppb (parts per billion) level can be achieved, and trace gas components such as CO ₂ and CH ₄ can be accurately detected, which meets the standards of the World Meteorological Organization (WMO) and the Integrated Carbon Observing System (ICOS).
Time of flight mass spectrometry technology: For example, the Vocus ABC monitor uses real-time chemical ionization time-of-flight mass spectrometry, combined with the fast voltage polarity and reagent ion switching of the technology, supporting up to six chemical ionization modes of reagent ions at the same time. Within a 2-second cycle, it can cover multiple AMCs with spectra, achieving detection limits at the level of single ppt (trillions of parts).
Real time monitoring and rapid response
Millisecond level spectral measurement and second level instrument response: The system can complete spectral measurement in milliseconds and respond to concentration changes in seconds, suitable for capturing instantaneous fluctuations of AMC and meeting the strict real-time requirements of semiconductor manufacturing.
24-hour uninterrupted operation stability: Through high-precision sensors and advanced algorithms, it ensures stable and reliable data for long-term operation in complex process environments, avoiding the problem of low efficiency in manual sampling modes.
Multi gas synchronous detection capability
Multi component analysis capability: It can simultaneously monitor dozens of AMCs such as acidic gases (such as HCl, H ₂ SO ₄), alkaline gases (such as NH3), volatile organic compounds (VOCs), etc., covering substances with different chemical properties and volatility, avoiding the limitations of traditional techniques that require multiple detections.
Full process automation and integration: from sampling and concentration to analysis and storage, the entire process is automated, reducing human intervention and improving detection efficiency.
Intelligent data analysis and closed-loop management
AI and big data support: By deeply mining massive amounts of data, automatic generation of pollution trend maps and pollution source tracking reports can assist managers in optimizing process flows and management strategies.
Remote monitoring and threshold warning: The system has remote monitoring function, which can immediately report abnormalities, avoid yield loss, and form a closed-loop management of "monitoring analysis governance verification" to continuously optimize the production environment.
Anti interference design and environmental adaptability
Professional fluid simulation and intake system: reduces instability caused by airflow, ensures a wide measurement dynamic range, and is suitable for environments with significant changes in vibration, temperature, humidity, and other conditions.
Non mechanical pump vacuum system: abandons high-speed rotating components, solves the problem of inability to operate and detect in multi-dimensional and large amplitude vibrations, and improves environmental applicability.