1、 Overview of Technical Background and Current Status

At present, gas chromatography-mass spectrometry (GC-MS) is mainly used for the analysis of volatile pollutants. Although this technology can provide accurate analysis results, it has obvious limitations: on-site sampling requires Suma tanks, which take several minutes to tens of minutes, and after the samples are sent to the laboratory, the analysis of each testing point requires at least 30 minutes or more; After the experiment, the Suma jar needs to be cleaned, otherwise it may cause deviation in the results; Sensitivity can only cover ppb ppm levels and cannot directly detect lower concentrations of pollutants, requiring additional sample processing methods. These issues highlight the drawbacks of lengthy and cumbersome temperament analysis processes, slow analysis speed, and insufficient sensitivity, making it difficult to meet the rapid detection needs of workshop air and other scenarios.

Therefore, a fast, accurate, easy to operate, and more sensitive analytical technique called Molecular Ion Reaction Mass Spectrometry (IMR-MS) has emerged. As a mature new branch of mass spectrometry in the past decade, IMR-MS can quickly detect small molecule organic residues (VOCs), with advantages such as simple testing, strong real-time performance, low cost, and short time consumption. In terms of rapid detection and trend evaluation, it is more competitive than laboratory gas chromatography-mass spectrometry, liquid chromatography-mass spectrometry, and vehicle mounted mobile testing technology.

In recent years, with rapid economic development and post pandemic economic recovery, environmental issues have become increasingly prominent. Molecular ion reaction mass spectrometry technology has gradually attracted widespread attention from manufacturers and users, and related technologies and products are constantly improving and becoming more mature. Among them, the ACE 1100 IMR-MS molecular ion reaction mass spectrometer developed by Young In Ace Company in South Korea has been extensively applied and verified in the environmental field, demonstrating millisecond level real-time detection, pptv level high sensitivity, and extremely low maintenance costs. It has significant help in improving the yield of semiconductor products and reducing production costs.

2、 Technical characteristics and indicators of molecular ion reaction mass spectrometer

1. Outstanding real-time performance: As a real-time mass spectrometer, the analysis frequency can reach once per millisecond, far exceeding traditional techniques.

2. Excellent ion source performance: The ion source used for analysis is not affected by the purity or volume of the sample ions, maintaining high analytical performance.

3. Precise separation and selection: Adopting dual mass quadrupole filters and reaction chambers to achieve fast and accurate ion selection.

4. Quantitative method: Quantitative analysis is achieved through chemical separation combined with quantitative curve (MTF), without the need for standard samples.

5. High sensitivity coverage: Three positive reagent ions and five negative reagent ions can be used to achieve quantitative/qualitative analysis at the sub pptv level.

6. Wide analysis scope: can analyze isotopes, isomers, volatile organic compounds, some inorganic compounds, and halogen compounds.

7. Sample processing simplification: No sample preparation process is required, and water containing gas samples can be directly analyzed.

3、 Comparison with Gas Chromatography Mass Spectrometry (GC-MS)

Comparison of mass spectra between EI source and chemical source

Better signal-to-noise ratio with fewer samples

2pg, 100 fg hexafluorobenzene, full scan, selected ion m/z 283.8

4、 Application Fields

（1） Semiconductor manufacturing industry

Mainly used for monitoring small molecule chemical residues in production workshops and monitoring the surrounding environment of factories. Early detection of molecular pollutants (AMCs) in the air is crucial for product yield in semiconductor production lines. Common AMCs include:

-Molecular acid (MA) - molecular base (MB) - condensable molecule (MC) - molecular dopant (MD)

（2） New energy industry

Continuous online detection of hydrogen and impurities applied to hydrogen fuel cells to ensure battery performance and safety.

（3） Medical industry

Through respiratory gas detection, quickly identify microorganisms for screening high-risk people such as diabetes, kidney disease and respiratory disease.

（4） Automotive industry

-Continuous online rapid detection of engine oil consumption

-Engine emission dynamic testing (especially in compliance with National VI standards)

（5） Environmental industry

-Environmental VOC traceability

-Assessment of the Environmental Impact of Road Motor Vehicle Emissions

-Water quality analysis

-Indoor Air Quality Assessment

（6） Food and tobacco industry

-CO ₂ gas impurity detection for beverages - tobacco gas analysis - spice development and odor evaluation

5、 List of detectable VOC compounds