1、 Preparation before operation

Sample pretreatment: Ensure that the sample is dry and free of volatile substances (to avoid contaminating the tube). Conductive samples can be used directly, while non-conductive samples require gold/carbon spraying treatment (to prevent charge accumulation); The sample size should be adapted to the sample stage to avoid exceeding the load-bearing range.

Instrument inspection: observationField emission scanning electron microscopeWhether the power supply and vacuum system are normal, there are no residual samples or debris inside the tube, and the liquid level of the cooling system (such as liquid nitrogen) meets the requirements.

Safety regulations: Wear protective gloves (to avoid fingerprint contamination of samples/instruments), strictly prohibit opening the electron gun when the vacuum is not up to standard, and stay away from the observation port of the tube (to prevent radiation).

2、 Core operational steps

1. Sample loading

Open the door of the sample chamber and fix the pre processed sample on the sample table (ensuring a secure installation and avoiding movement);

Close the sample chamber door, start the vacuum system, and wait for the vacuum level to meet the instrument requirements (usually the "Vacuum Ready" indicator light is on).

2. Start the electron gun and set its parameters

After reaching the vacuum standard, turn on the electron gun and select the acceleration voltage (adjusted according to the sample type, generally 1-30kV, high voltage for conductive samples and low voltage for non-conductive samples);

Set the emission current (follow the recommended range of the instrument to avoid excessive damage to the sample or instrument).

3. Observe and locate the sample

Adjust the XYZ axes of the sample stage and locate the target area through an optical microscope or low magnification electron image;

Switch to the appropriate magnification (gradually adjust from low magnification to high magnification, with low magnification for positioning and high magnification for detailed observation).

4. Image adjustment and acquisition

Adjust brightness and contrast to make the image clear (avoid being too bright or too dark);

Select image resolution (adjusted according to requirements, high resolution is suitable for detail analysis, low resolution is suitable for quick preview);

Click the "Capture" button to save the image (JPG, TIFF, and other formats can be selected).

5. Shutdown process

First, turn off the electron gun and reduce the acceleration voltage to 0;

Wait for the vacuum system to release pressure (do not forcefully open the door), and take out the sample after the pressure release is complete;

Turn off the power and cooling system of the instrument, clean the sample stage and operating area.

3、 Key precautions

When the vacuum is not up to standard, it is strictly prohibited to turn on the electron gun or open the sample chamber door, otherwise it will damage the tube and electron gun;

The sample must be dry, non corrosive, and avoid contaminating the vacuum system or the interior of the tube;

When adjusting the magnification and sample stage, the action should be slow to prevent the sample from colliding with the tube;

ifField emission scanning electron microscopeIf there are abnormalities such as blurred images or discharge, immediately turn off the electron gun and contact technical personnel for troubleshooting. Do not disassemble the instrument by yourself.