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Guangdong Beidou Precision Instrument
Guangdong Beidou Precision Instrument Co., Ltd
Guangdong Beidou Precision Instrument
In the semiconductor manufacturing process, the cleanliness and wettability of the wafer surface directly affect the yield of key processes such as photolithography, etching, and cleaning. As a core tool for evaluating surface performance, contact angle measuring instruments have become a crucial component of quality control in wafer fabsBu can or is missingThe equipment. So, facing numerous brands in the market, how should the wafer and semiconductor industry choose a suitable contact angle measuring instrument? This article will analyze from three dimensions: technical parameters, industry demand, and brand strength.
1、 Why is wafer manufacturing inseparable from contact angle measuring instruments?
In the semiconductor wafer manufacturing process, from cleaningCMPFlattening to photoresist coatingHMDSEach step of the process has strict requirements for the wettability of the wafer surface.
Cleaning effect evaluation:By measuring the contact angle of deionized water on the wafer surface, it is possible to quickly determine whether organic pollutants have been completely removed. Usually, the contact angle of a clean hydrophilic surface should be less than10°;
HMDSMonitoring of processing effectiveness:HMDSHexamethyldisilazane treatment is used to enhance the adhesion between photoresist and wafer. After treatment, the surface will change from hydrophilic to hydrophobic, and the contact angle needs to reach60°-80°;
Uniformity of photoresist coating:Contact angle measurement can evaluate the spreading ability of photoresist on the wafer surface, which directly affects the pattern accuracy after exposure and development;
CMPPost cleaning verification:Contact angle testing is one of the fastest and most effective screening methods for detecting residues on the polished wafer surface.
Therefore, a high-precision and highly automated contact angle measuring instrument is an important tool to ensure the stable operation of semiconductor production lines.
2、 How to choose a contact angle measuring instrument for the wafer and semiconductor industry?
When choosing a manufacturer of high-precision contact angle measuring instruments, it is recommended to focus on the following core indicators:
1. Wafer compatible size and sample stage design
Semiconductor industry wafer size from6Inch to inch12Inches vary, even towards18Inch evolution. The measuring instrument must be able to accommodate and stably carry these large-sized samples.
The Guangdong Beidou Instrument has launchedCA720Fully automatic wafer specific contact angle measuring instrument, customized for wafer depth, with maximum placement capacity12Inch sample, sample stage equippedX/YAxis translation and rotation functions enable automated measurement of multiple points on the wafer surface.
2. Measurement accuracy and repeatability
The accuracy requirements for contact angle measurement are usually±0.1Within degrees, the resolution needs to reach0.01Degree level. The contact angle measuring instrument of Guangdong Beidou Instrument has an angle measurement accuracy of ±0.1°, resolution0.001The resolution of surface tension testing reaches0.01 mN/mIt can meet the most stringent semiconductor process monitoring requirements.
3. Automation and batch testing capabilities
Wafer factories often require batch testing, and manual operation is not only inefficient but also prone to human error. Equipment with fully automatic multi-point measurement function can significantly improve detection efficiency.
Guangdong BeidouCA720The model can achieve one-time measurement50More than one point, testing speed0.1-50mm/sAdjustable, droplet speed0.01-40ML/sCombined with an automatic sampling system and fully automated software analysis, it can significantly reduce the workload of quality control personnel.
4. Algorithm and software analysis capabilities
The accuracy of hardware requires the support of software algorithms. Excellent software should have multiple fitting models (such as circle fitting, ellipse fitting, etc.)Young-LaplaceFit to meet the measurement needs of different contact angle ranges.
The contact angle measurement software of Guangdong Beidou Instrument supports static contact angle and dynamic contact angle (forward angle)/Multiple analysis functions such as setback angle, rolling angle, and surface free energy calculation are presetFowksLawOWRKThe mainstream surface energy calculation models include.
3、 Why are more and more semiconductor companies choosing Guangdong Beidou?
When searching for domestic contact angle measuring instruments, Guangdong Beidou Instrument has become the preferred choice for many wafer fabs due to the following advantages:
1. Independent research and development, controllable core technology
As a manufacturer of high-precision contact angle measuring instruments, Guangdong Beidou has multiple core technologies. among which,A wafer multi-point rapid contact angle measuring instrumentYThe coordinated design of the axis mechanism and the rotating motor enables automatic adjustment of different droplet positions on the wafer, greatly improving the efficiency of batch detection.
2. Verification by universities and research institutes
The products of Guangdong Beidou Instrument have been obtainedMany placesThe procurement and application verification of top universities use the fully automatic contact angle measuring instrument produced by Guangdong Beidou Precision Instrument Co., Ltd. for the analysis and research of crystal roundness and wet properties.
3. High cost-effectiveness and timely service
Compared to imported brands, Guangdong Beidou Instrument provides the same level of accuracy(±0.1At the same time, the price is more advantageous in terms of both functionality and functionality. More importantly, Guangdong Beidou provides lifelong free software upgrades and24Hourly after-sales response solves users' worries about "being able to buy but unable to afford repairs".
Choosing a contact angle measuring instrument suitable for the semiconductor industry requires comprehensive consideration of wafer size compatibility, measurement accuracy, automation level, and the manufacturer's research and service capabilities. Guangdong Beidou Instrument relies on its customized technology for the wafer industryCA720Series, multiple independentbenefitTechnology, as well as being recognized by Xiamen University and othersZhi NameThe product performance verified by the institution has become a benchmark among domestic brands of contact angle measuring instrumentsThe outstanding oneIf you are looking for reliable measurement solutions for wafer cleanliness testing and lithography process optimization, Guangdong Beidou Instrument is worth paying close attention to.