The customer is one of the leaders in the industrialization of silicon carbide (SiC) power devices in China. In 2021, they installed the first ThetaMterisis FR Scanner AIO Mic. Due to the good condition of the machine, the customer purchased the second and third devices (including visible and ultraviolet light ranges) this year.
The FR Scanner AIO Mic film thickness measuring instrument adopts visible light interferometry measurement in the wavelength range of 370-1020nm, which can measure film thickness in the range of 12nm-90um (5X lens), with an accuracy of up to 0.2% or 2nm and an accuracy of 0.02nm. It is a cost-effective film thickness measuring device. The UV configuration of FR Scanner has a wavelength range as low as 200nm and can be applied to film thickness in the range of 4nm-60um (5X lens) with an accuracy of up to 0.1% or 1nm. Most film thickness measuring instruments on the market have significantly reduced their film thickness measurement range after adding microscope configuration, but ThetaMeritis products do not have this situation and their film thickness measurement range is still wide. It is worth mentioning that implementing multi-point Mapping measurement function is a standard feature of the FR Scanner series.