The user is a laboratory located in Huairou, Beijing, which is a national level new scientific research institution. It conducts strategic, forward-looking, and fundamental scientific and technological research aimed at building a clean, low-carbon, safe, and efficient energy system and achieving the strategic goals of "carbon peak and carbon neutrality".

ThetametrisisThe film thickness measuring equipment is mainly used for measuring the thickness of coatings such as oxides, photoresists, semiconductor compounds, etc. in a certain process stage of customers.

ThetaMetrisisThe core technology is white light reflectance spectroscopy（WLRS）It can accurately measure the thickness and refractive index of stacked thin films and thick films over a wide range from a few angstroms to millimeters.

FR-MProbeThe micro thin film measuring instrument provides a one-stop solution for optical measurements such as absorbance, transmittance, reflectance, and fluorescence in various modes through an optical microscope.

FR-MProbeIt mainly consists of two optical components: a spectrometer operating within the spectral range supported by the microscope and a three tube optical microscope installedC-mountModules on the port. The light source used for measurement comes from the optical microscope itself. The area for measuring the size of the light spot is defined by the magnification of the objective lens used. usually for50XObjective lens, the measurement area is a diameter of approximately5MmThe circle. By using higher magnification or smaller aperture objective lenses, the measurement spot can be further reduced.