This unit is a research institute under the Chinese Academy of Sciences and an important research and development institution in the field of microelectronics science and technology and integrated circuits in China. The main application direction is related research on compound semiconductor devices and circuits.

PLSINTECProduced by the companyUltraShapeTMThe wafer morphology and size detection and sorting system is the highest production capacity detection system in the industry. The detection of wafer morphology and size is of great significance in the manufacturing process.

In various stages of semiconductor design, manufacturing, and packaging, repeated testing and inspection are required to ensure that the process meets the preset indicators and prevent unqualified wafers with deviations and defects from entering the next process flow. From design verification to the entire semiconductor manufacturing process, detection equipment plays an irreplaceable and important role.

UltraShapeTMThe crystal shape detection and sorting system uses high-precision and high-speed confocal dual probe sensors to achieve non-contact measurement of wafers; By combining high-precision motion modules and wafer robotic arms, the measurement accuracy of wafer morphology can reach sub micron level. This system is suitable for wafers made of various materials, including silicon, silicon carbide, sapphire, glass, gallium arsenide, gallium nitride, etc; The achievable measurement contents for size and structure includeTTVTheBowTheWarpTheThicknessTheTIRTheSagTheLTV（FullmapTesting, etc.