The iteration of 12 inch wafer drying machine technology is leading towards high standardization, modularity, and intelligence

1. Technological route differentiation

Plasma drying: With high drying uniformity and low particle contamination rate (particle residue<10 particles/sheet), it accounts for over 58% of advanced processes at 28nm and below, becoming the mainstream technology direction.

High speed rotary drying: By combining centrifugal spin drying with hot air/inert gas blowing, the single piece processing time is less than 1 minute, compatible with 8-12 inch wafers, and suitable for large-scale production.

Vacuum drying: Low temperature environment (<40 ℃) to avoid metal oxidation, excellent particle control, but high equipment cost, small batch processing capacity, mainly used for advanced packaging.

2. Trend of intelligent upgrading

AI visual inspection: Real time monitoring of wafer drying status, automatic adjustment of parameters, and improvement of yield.

Digital twin technology: Simulate the drying process, optimize the process path, and shorten the research and development cycle.

Modular design: supports multi chamber integration, with 4-6 process chambers configured for a single device, with a maximum production capacity of 300 pieces per hour, meeting high production capacity requirements.

Expansion of application scenarios for 12 inch wafer drying machines, upgrading of driving equipment performance:

1. The demand for advanced processes has surged

With the expansion of production capacity of complex structured chips such as 3D NAND and FinFET, higher requirements have been put forward for the cleanliness and stability of the drying process.

2. Emerging fields generate new demands

Automotive electronics: The migration of automotive grade chips from 8 inches to 12 inches places strict demands on the reliability and particle control of drying equipment.

Artificial Intelligence and High Performance Computing: The explosive demand for AI chips is driving the expansion of 12 inch wafer fabs and upgrading drying equipment towards high production capacity and low damage.