1、 Instrument name

Chinese name:Field emission scanning electron microscope

English name:Field Emission Scanning Electron Microscope

2、 Model:ZEISS GEMINI 500

3、 Manufacturer:Zeiss GmbH, GermanyZEISS

4、 Instrument Introduction：

ZEISS Gemini 500Scanning electron microscope is a fully functional field emission scanning electron microscope（FE-SEM）High resolution, high contrast, and high signal-to-noise ratio can be achieved using secondary electrons and backscattered electronsIn-lensDetection can obtain clear images even for demanding non-conductive samples, and can perform contrast and low-voltage imaging on various samples. Also equipped with BrookeXX-ray energy spectrometer can be widely used for micro area morphology and composition analysis.

5、 Main characteristics and technical indicators of the instrument:

1Resolution:≤0.6 nm@15KV(Secondary electrons), ≤1.1nm@1kV(Secondary electrons, without any special modes); ≤1.2nm@500V；

2. Magnification factor:20-2,000,000

,According to changes in acceleration voltage and working distance, the amplification factor is automatically calibrated, and there is no need to change modes for low and high magnification;

3. Electron gun: SchottkyThermal field emissionElectronic gun;

4. Range of acceleration voltage or landing voltage:0.02kV～30 kVStep by step10V, continuously adjustable;

5. Probe current: maximum current ≤100nA；

6. The tube has an electrostatic lens design inside, which canferromagnetic materialPerform high-resolution imaging;

7. Maximum sample size that can be accommodated ≥200mmThe maximum sample height is ≥60mm；

8. Five axis optimal center motor-driven sample stage, maximum range of movementIndicator:X≥130mm，Y≥130mm，Z≥50mm, bidirectional tilt, tilt range-3°-70°Rotation ≥360°(Continuous rotation);

9. The sample room has an independent backscattered electron detector（EsB）；

10. Secondary electronic detector in the sample room（SE）；

11. Ultra high resolution installed on the positive optical axis inside the lens barrelIn-LensSecondary electronic detector（In-Lens SE）；

12. Equipped with air lock（air lock）Replace the sample with a shorter vacuum extraction time;

13. Energy spectrometer ≥60 mm²Area of active zone

6、 Main functions and uses of the instrument:

1. Observation of microstructure of materials in fields such as materials science (metallic materials, non-metallic materials, nanomaterials, organic materials), chemical science, metallurgy, biology, medicine, semiconductor materials and devices, geological exploration, criminal investigation, industrial production, etc. (Liquid samples must be thoroughly dried before testing)

2. Real time micro area composition analysis, element quantitative and qualitative composition analysis, rapid multivariate elemental surface scanning, and point and line scanning distribution measurement for materials.

7、 Instrument image

8、 Application examples

1. Morphological analysis:

A certain research group needs to observe the microstructure of metal silver nanostructures to verify their good application prospects in the field of catalysis. We conducted tests on the sample using different magnifications, scanning modes, and energy spectrum testing. The results are as follows:

1.1 Observation at different magnifications

1.2 Observation under different scanning modes

2. EDSQualitative analysis of elements:

2.1Point Scan

2.2 Line scanning

2.3 area scan

Note: The article is reproduced from the Department of Materials Science and Engineering, Qilu University of Technology《ZEISS G500 Ultra High Resolution Scanning Electron Microscope》.