1、 Project background: Semiconductors usher in the second development curve

Driven by generative artificial intelligence, the semiconductor industry has rebounded significantly in the past two years. According to multiple predictions, the semiconductor industry will continue to grow,2030Expected breakthrough in the year1Trillion dollar milestone. In China, facing the severe reality of semiconductor being 'choked', its development speed is rapid and the demand is large. The country also attaches great importance to the development of semiconductors and continues to propose supportive policies.

2、 Company Profile: Committed to the localization of semiconductor technology

A semiconductor enterprise provided by Jingliang Technology is committed to domestic substitution and professional layout of silicon carbide process. After years of process accumulation, it has formed a series of products including etching process equipment, thin film deposition process equipment, etc., mainly used in the semiconductor front-end process stage, such as compound semiconductor processing of silicon carbide, gallium nitride, etc.

3、 Condition requirement: Exceeding the supply cycle to ensure production quality

This semiconductor company provides downstream customers with equipment for thin film deposition, etching, and debonding, which are used to make and deposit thin film layers on substrate materials to form functional layers of chips. In chemical vapor deposition（CVD）During the process, it is necessary to use a gas-liquid mixed evaporator to evaporate and mix the liquid source material, thereby forming a uniform thin film during the deposition process.

The semiconductor company needs to replace a foreign brand and proposes the following requirements:
1.Short and stable supply cycle;
2.Ensure that the liquid evaporates fully;
3.Fast response speed, uniform output of mixed evaporated gas;

4.The liquid flow accuracy meets the specified standards.

4、 Solution: Short supply cycle to ensure production quality

After understanding the requirements, we design a gas-liquid mixed evaporation system for the customer based on the mixed medium and operating conditions.

The system is configured with a controllable evaporative mixerx1Liquid mass flow controllerx1Gas mass flow controllerx1Temperature controllerx1.

Image: ACU20CEM Controllable Evaporation Mixer Product for Gas Liquid Mixing Evaporation System

The system configuration is as follows:

Controllable evaporative mixer:The maximum range for gas is 10 ln/min, and the minimum range for liquid (water) is 120 g/h.
Liquid mass flow controller:Accuracy ± 0.25% F.S, repeatability 0.05% F.S.
Gas mass flow controller:Accuracy ± 0.5% F.S, repeatability ± 0.2% F.S.

Temperature controller:It can control high temperatures up to 200 ℃~300 ℃, fully meeting the specified medium evaporation conditions.

For specific parameter communication, please contact the product manager on the page!