Power system malfunction

Phenomenon: Equipment unresponsive, abnormal fluctuations in current and voltage

Diagnostic steps:

Check if the power cord, plug, and socket connections are secure, and use a multimeter to test the voltage output stability.

Inspect the internal circuit of the power module and check if the fuse is blown or if the capacitors and inductors are aging.

Solution:

Reconnect loose parts and replace damaged power cords or sockets.

Repair or replace the power module to ensure that the voltage output meets the device specifications.

Vacuum system malfunction

Phenomenon: Insufficient vacuum degree, prolonged pumping time

Diagnostic steps:

Use a helium leak detector to locate leakage points in vacuum pipelines, sealing rings, or pump bodies.

Check the oil level and quality of the vacuum pump, and observe whether there is any abnormal noise or overheating in the pump body.

Solution:

Replace the aging sealing ring and tighten the loose flange interface.

Clean or replace the vacuum pump oil, and repair the mechanical failure of the pump body.

Abnormal sputtering process

Phenomenon: The target material does not glow and the film thickness is uneven

Diagnostic steps:

Check if the target material is installed vertically and if there are any oxide layers or contaminants on the surface.

Measure the insulation resistance between the target material and the ground wire to eliminate the risk of short circuit.

Monitor the sputtering voltage/current curve to determine if there is arc discharge or mode transition.

Solution:

Reinstall the target material and adjust the spacing, clean the surface with isopropanol.

Repair the ground wire connection and add insulation gaskets.

Optimize power matching parameters to suppress arc discharge.

Gas control system malfunction

Phenomenon: Unstable gas flow rate, imbalance of reaction gas ratio

Diagnostic steps:

Check the calibration status of the quality flow meter and observe if there is any leakage in the valve.

Analyze the residual gas composition and confirm if there is any external gas infiltration.

Solution:

Re calibrate MFC and replace the leaking valve.

Optimize the gas path layout and add gas purification equipment.

2、 Systematic maintenance strategy

routine maintenance

Cleaning and maintenance:

Wipe the equipment casing with a dust-free cloth daily to avoid dust accumulation.

Clean the interior of the sputtering chamber weekly and use a specialized solvent to remove any residue from the target material.

Parameter monitoring:

Record key parameters such as vacuum degree, sputtering voltage/current, and establish trend analysis charts.

Regularly check the coolant level and temperature to ensure the proper functioning of the cooling system.

regular maintenance

Electrical system:

Check if the power cord and control board connector are oxidized, and tighten loose screws.

Test the stability of high-voltage power output and replace aging capacitors.

Mechanical components:

Lubricate the rotating components of the vacuum pump and replace worn belts or bearings.

Check the flexibility of the target rotation mechanism and remove any stuck foreign objects.

Vacuum system:

Replace the vacuum chamber sealing ring.

Clean the inner wall of the vacuum pipeline to remove sediment.

preventive maintenance

Consumables management:

Establish an inventory warning mechanism for consumables such as target materials and sealing rings to avoid downtime caused by missing parts.

Prioritize the use of target materials with strong anti poisoning capabilities.

Environmental control:

Maintain stable temperature and humidity in the laboratory to reduce the risk of equipment condensation.

Install anti-static flooring to prevent electrical components from being broken down by static electricity.

3、 Key precautions

Safe operation:

Before maintenance, the power must be disconnected and the high voltage capacitor must be discharged.

Wear cut resistant gloves when handling target materials to avoid scratches from metal debris.

Data backup:

Regularly backup device control software parameters to prevent system crashes and process loss.

Professional support:

Complex faults require contacting the original factory engineer for repair to avoid unauthorized disassembly and warranty failure.