As a high vacuum multifunctional coating machine, the design advantages of the gold plating and carbon plating integrated machine are mainly reflected in modular structure, intelligent control, high-precision coating, safety protection mechanism, etc. The specific analysis is as follows:
1、 Dual component modular design: functional integration and flexible switching
The device adopts integrated magnetron sputtering components (gold plating) and thermal evaporation components (carbon plating), and achieves functional complementarity through a dual independent chamber design:
1. Gold plating function: Based on the principle of magnetron sputtering, high-energy ions are used to bombard metal targets (such as gold, platinum, silver, etc.) to deposit metal atoms on the surface of the sample, forming a dense conductive film. This technology is suitable for electrode preparation, electrochemical analysis, and other scenarios, which can significantly improve the conductivity and corrosion resistance of samples.
2. Carbon plating function: Using the principle of thermal evaporation, carbon fibers or carbon rods are heated at high temperatures to vaporize carbon atoms and deposit them on the surface of the sample, forming a hard carbon film. This technology is commonly used for sample pretreatment in electron microscopy (SEM), which can eliminate discharge phenomena caused by charge accumulation, enhance secondary electron/backscattered electron signals, and improve imaging quality.
3. One click switching mode: Users can directly switch between gold plating or carbon plating mode through the 7-inch color touch screen, without the need to replace components or restart the device, increasing operational efficiency by more than 50%.
2、 Intelligent control system for gold and carbon plating integrated machine: full process automation and precise control
The equipment is equipped with fully automatic control software and supports bilingual operation interfaces in Chinese and English, enabling real-time monitoring and dynamic adjustment of coating parameters such as vacuum degree, deposition rate, and film thickness
1. Vacuum system: equipped with a combination of molecular pump and mechanical pump, it can reduce the vacuum degree of the chamber to below 10 ⁻⁴ Pa within 10 minutes, ensuring no pollution during the coating process.
2. Deposition rate control: By adjusting the power supply and gas flow rate, the deposition rate of metal or carbon atoms can be precisely controlled (with an error of ≤± 1%), achieving uniformity of film thickness (within ± 3%).
3. Data recording and export: The system automatically records coating parameters and experimental results, supports USB or network transmission, and facilitates subsequent analysis.
3、 High precision coating technology: nanoscale particles and uniform film layer
The equipment achieves a dual breakthrough in coating particle size and film properties by optimizing the design of sputtering targets and evaporation sources
1. Particle size control: In gold plating mode, the size of metal particles can be controlled within 3-5nm (taking platinum as an example), which is much lower than traditional electroplating processes, significantly improving the density and adhesion of the film layer.
2. Uniformity of film layer: By using a rotating sample stage and dynamic magnetic field scanning technology, the thickness deviation of the film layer is ensured to be ≤± 2%, which is suitable for large-area samples or complex structural samples.
4、 Safety protection mechanism of gold-plated carbon plated all-in-one machine: software and hardware interlocking and anti pollution design
The device constructs multiple security protection systems from both hardware and software levels:
1. Anti fouling baffle design: An adjustable baffle is installed between the magnetron sputtering and thermal evaporation chambers to prevent metal particles from contaminating the carbon evaporation source during the gold plating process, or carbon particles from depositing on the surface of the metal target during carbon plating, thereby extending the service life of the equipment.
2. Software and hardware interlock function: When the vacuum degree does not meet the standard, the power supply is abnormal, or the chamber door is not closed, the system automatically locks the operation interface and alarms to avoid equipment damage or personnel injury caused by misoperation.
3. Emergency stop button: The equipment is equipped with a red emergency stop button that can cut off all power and gas supplies within 0.1 seconds, ensuring quick response in case of emergencies.