In the semiconductor deep ultraviolet lithography process, trace level AMC air molecule pollutants such as NH3, HCL, and HF can be regarded as "invisible killers" of product quality. Their reaction with chemically amplified photoresist directly affects the performance of semiconductor devices. However, traditional monitoring methods are complex to operate, have slow response times, and insufficient accuracy, making it difficult to meet the real-time and precise monitoring needs of the industry. In this context, Duke Tech has launched the Orion 3100S AMC air molecule pollutant monitoring system, which breaks through industry pain points with technology and provides a solution for semiconductor cleanroom monitoring.

As a monitoring device specifically designed for the semiconductor industry, the core advantage of the Orion 3100S AMC air molecule pollutant monitoring system comes from CEAS (cavity enhanced absorption spectroscopy) technology. Compared with traditional indirect measurement methods such as impact dust filters, ion chromatography, and CRDS technology, this system does not require strict alignment of the laser beam, is easy to install, and has strong mechanical stability, which can quickly and accurately capture trace level pollutants. Its detection accuracy reaches the industry level, with detection limits as low as 0.1 ppb for HCl and HF, and less than 0.1 ppb for NH3, achieving sub ppb level real-time measurement while effectively avoiding cross interference from atmospheric water vapor, CO ₂, O ₂ and other components, ensuring accurate and reliable data.

The system is fully adapted to semiconductor production scenarios in terms of functional design and has multidimensional core competitiveness. The response speed is extremely fast, and each channel can complete detection in just 5 seconds. With flexible configuration of 1-64 channels, it can cover a wide measurement area and meet the high sensitivity response requirements of multiple gases. Built in Linux system computer, supports massive data storage and multi interface output, can integrate 4-6 analyzer data through Ethernet, RS485/RS232 or 4-20mA analog modules. The exclusive DUKE HMI software integrates multi-point sampling control, real-time data curve display, alarm, historical trend analysis and other functions, and also supports remote network control. Users can achieve multi-level permission operations at any networked location with the help of a browser, and can also connect to Duke Tech headquarters or service providers for remote diagnosis.

In addition, the Orion 3100S AMC air molecule pollutant monitoring system demonstrates convenience and economy. Adopting 310 stainless steel movable cabinet, plug and play, clean room deployment can be completed within a few minutes; No consumables such as reagents and radioactive sources are consumed, and solid-state electronic devices have no movable parts, resulting in extremely low maintenance costs and long maintenance free periods. The system also has the advantages of independent programmable alarms, relay settings, no loss of power outage data, and 80 meter ultra long pipeline sampling. The open communication protocol is more conducive to secondary development and integration, adapting to the demanding production requirements of the semiconductor industry.

The launch of this system not only effectively improves the impedance consistency of semiconductor devices, prolongs the service life of filters, reduces production downtime, but also empowers technology to promote the upgrading of clean production levels in the industry. With years of experience in the semiconductor industry, Duktech provides reliable AMC monitoring guarantees for semiconductor companies through technology and thoughtful services.