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E-mail
huijuan_sun@bct-tech.com
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Phone
18610719775
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Address
Building 1, Courtyard 6, Anqing Street, Airport Industrial Zone B, Shunyi District, Beijing
Solution
Beijing Boside Technology Co., Ltd
Solution Overview
Driven by the demand for artificial intelligence and high-performance computing, and with the development of fourth generation semiconductor materials and chip technology, chip linewidth has rapidly entered the era below 7nm from 70nm. The importance of detecting trace gaseous molecular pollutants (AMC) in production processes below 30nm has risen to a very high level.
The introduction of trace precision, comprehensive monitoring, automatic big data analysis, and AI intelligent control concepts in AMC monitoring plays a crucial role in reducing the yield impact caused by AMC.
The BCT-AMC series, independently developed and produced by Beijing Boside Technology Co., Ltd., is a semiconductor process environment monitoring system that covers multiple scenarios such as online monitoring, laboratory analysis, and on-site traceability analysis of machines. It provides accurate and quantitative analysis of more organic species, with a high degree of automation and integration in the analysis process. In conjunction with a dedicated AMC pollution database and disposal plan library, with the support of AI technology, it truly solves practical problems for the quality control department and micro pollution control department.
typical scenario
1. Process Point - Online Automated AMC (VOCs) Precision Analysis System
Production monitoring point deployment online monitoring:
• Use ultra clean PFA sampling tubes to set up monitoring points in the factory area, with a monitoring range of up to 35000m2~75000m2
• Automatic sampling, concentration, GC-MS analysis, cloud storage, AI automatic generation of detection reports, with over threshold alarm function
24/7 automated scheduling monitoring
• Inert coating of all components throughout the entire process to avoid residue and adsorption
Specialized capture system and focusing system significantly improve the detection line, resulting in sharper peak shapes
2. Suspected Point Laboratory AMC (VOCs) Precision Analysis System
Suspected point manual sampling laboratory analysis:
The system is used in the laboratory and, based on its strong capture ability, strong impurity removal ability, strong anti adsorption ability, high injection accuracy, dedicated gas paths, no cold spots throughout the entire process, and very clean cleaning, works together to achieve a lower detection limit
• Quantitative analysis of unknown components: The system can perform comprehensive material analysis on the sample
AMC (VOCs) substance detection method package developed specifically for semiconductor companies
Strong timeliness of detection: Quickly identify and quantify pollutants, and promptly discover the source of AMC (VOCs) pollution
Wafer quartz heating furnace, heating volatilization injection:
AMC (VOCs) substance detection method package developed specifically for semiconductor companies
Strong timeliness of detection: Quickly identify and quantify pollutants, and promptly discover the source of AMC (VOCs) pollution
3. Workbench - Portable AMC (VOCs) Precision Analysis System
Workbench - Pollution Traceability Analysis:
• Quick analysis
Single mass spectrometry in flight mode, the instrument enters the mass spectrometer directly without passing through the chromatographic column, for second level analysis and real-time data generation.
• High sensitivity
Targeted traceability with higher sensitivity: single mass spectrometry mode, second level response, real-time dynamic display of pollution situation, and if necessary, ion screening can be carried out using SIM mode for targeted navigation.
Membrane injection technology enables secondary enrichment of samples before entering mass spectrometry, improving sensitivity
• Accurate traceability
New navigation mode, deep into the workshop, pointing directly to the source
Compared to traditional navigation equipment, it is lighter in weight and more earthquake resistant. On the basis of traditional navigation, it can further enter the workshop, accurately trace back to the pollution generation process point, and help enterprises achieve pollution control.
• Accurate results
Dual working mode: sailing mode+GC-MS fixed-point analysis mode
Using a 70eV EI source and quadrupole mass spectrometry for qualitative and quantitative analysis, fully ionize VOCs in the air, and rely on the standard NIST spectral library for accurate characterization; Supported by national standards, the results are comparable to those in the laboratory.
Strong environmental applicability
Non mechanical pump vacuum system with stronger environmental applicability
Abandoning high-speed rotating components and adopting non mechanical vacuum pumps to solve problems such as inability to operate and detect in multi-dimensional and large amplitude vibrations.
Data results and detection spectra
The introduction of AMC monitoring solution for semiconductor process plant and equipment environment has been completed. For more information, please contact us!