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Anhui Beike Equipment Technology Co., Ltd
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Anhui Beike Equipment Technology Co., Ltd

  • E-mail

    ahbeq888@163.com

  • Phone

    17305697718

  • Address

    Beike Feixi Base, No. 6 Yixiu Road, Hefei City, Anhui Province

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Brief Introduction

Technical Specifications

1. Heating element: Imported KTL resistance wire.

2. Number of heating zones: 5-8 zones (customizable according to requirements), achieving two-point control of one temperature curve to make the temperature field more uniform.

3. Sublimation zone temperature: continuously adjustable from room temperature to 800 ℃.

Temperature in the insulation area: adjustable from room temperature to 400 ℃; The constant temperature fluctuation with time and space shall not exceed ± 1 ℃ (the testing method complies with the national metrological standard JJF 1184-2007).

4. Capacity of Shenghua Boat: 0.5-10 grams, 50-500 grams, 500-2000 grams.

5. Temperature control method: human-machine interface with PLC control, 10 inch LCD screen control, digital industrial control instrument dual control, using industrial intelligent temperature control instruments and software to achieve dual control, using fuzzy PID control.

6. Paperless recording: Built in storage records process data, external USB interface, can be connected to a computer for one click copying of data.

7. Structural description: ① The equipment can be electrically turned on in half, and the cooling and cooling system is automatically controlled Realize controllable cooling speed

② Equipped with two high-precision mass flow meter systems at the feed end to accurately control gas flow, it can achieve production process expansion and adjustment.

③ The system adopts an automated process flow, with one click operation set for the process to reduce human factors, and the process reliability can reach 99.9%.

8. Filtration method: The system adopts a three-stage filtration protection device, which includes a 5-stage microporous metal filter, 2 sets of liquid nitrogen embedded condensation, and a 90 degree right angle step filtration.

9. The outer tube size is Φ 210X2000mm, and the chamber adopts a three-layer quartz tube device, which can automatically feed and discharge materials. The structure can ensure that the vacuum chamber tube is not contaminated and maintain a high vacuum degree. The middle layer tube is convenient for material retrieval and easy to clean. The inner layer tube is segmented and sublimated, making it easy to distinguish between different sections of material, ensuring maximum product purity and yield (maximum sublimation rate of 97%, depending on the material and configuration).

10. The cavity adopts internal and external temperature control switching to prevent uneven temperature field caused by quartz refraction and scattering.

11. The front end face of the equipment is equipped with quartz sealed observation windows, which can observe the purification of materials during production. Coupled with a camera system, it can achieve full monitoring and recording of the production sublimation process.

12. The vacuum pumping end adopts a molecular pump with a main pipe diameter of 200mm for direct connection, ensuring the high vacuum requirements in the experiment. A plug valve is added in the middle of the 200mm diameter straight pipe, and a 3mm diameter thin tube porous side pumping branch is added at both ends of the plug valve to prevent excessive pumping speed during initial vacuum from affecting the direction of molecular diffusion and causing material unevenness.

13. Pre stage mechanical pump 60m ³/h, molecular pump pumping speed 160L/S.

Background vacuum: Mechanical pump system: 1Pa Molecular pump system 10-4Pa.

Multiple types of irregular inner tubes can be selected